3621397

Fabrication and characterization of a micro-machined ultrasonic transducer

Chenping Jia;M. Wiemer;N. Zichner;T. Otto;T. Gessner

4

2005

6/27/1905 12:00:00 AM

1945

1947

"Fabrication","Ultrasonic transducers","Biomembranes","Wafer bonding","Silicon","Piezoelectric transducers","Etching","Resonance","Acoustic transducers","Geometry"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603255

1603255