3627589

A 4Kb CMOS/SIMOX SRAM

Yasuhisa Omura;Sadao Nakashima;Katsutoshi Izumi

Atsugi Electrical Communication Laboratory, NTT 1839 Ono, Atsugi-shi, Kanagawa Pref. 243-01, Japan

1985

5/1/1985 12:00:00 AM

24

25

"Random access memory","MOSFETs","Silicon on insulator technology","CMOS technology","Substrates","Annealing","Metallization","Laboratories","Oxygen","Ion sources"

ieee

VLSI Technology, 1985. Digest of Technical Papers. Symposium on

4-930813-09-3

conf

4480285