3627591

SIMOX Technology for CMOS LSIs

Katsutoshi Izumi;Yasuhisa Omura;Masayuki Ishikawa;Eiichi Sano

Musashino Electrical Communication Laboratory, N.T.T. Musashino-shi, Tokyo 180, Japan

1982

9/1/1982 12:00:00 AM

10

11

"CMOS technology","FETs","CMOS process","Delay","Silicon","Read-write memory","Phase locked loops","Fabrication","Circuits","Dry etching"

ieee

VLSI Technology, 1982. Digest of Technical Papers. Symposium on

conf

4480554