Title :
The Fabrication Process of RF Inductor Structures in the LTCC Technology
Author :
G. Radosavljevic;A. Maric;G. Stojanovic;Lj. Zivanov;W. Smetana;M. Unger;H. Homolka
Author_Institution :
Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovi?a 6, Novi Sad, Serbia. E-mail: rgoran@uns.ns.ac.yu
Abstract :
This paper introduces the LTCC as a novel technology for the fabrication of multilayer microelectronic components. Advantages of the multilayer structure will be presented on the example of the 3D inductor.
Keywords :
"Fabrication","Radio frequency","Inductors","Nonhomogeneous media","Conducting materials","Microelectronics","Temperature","Optical design","Ceramics","Firing"
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Print_ISBN :
978-1-4244-0847-4
Electronic_ISBN :
2377-0678
DOI :
10.1109/SMICND.2007.4519693
