• DocumentCode
    3628682
  • Title

    Mechanically coupled comb drive MEMS stages

  • Author

    Aslihan Arslan;Caglar Ataman;Sven Holmstrom;Karin Hedsten;H. Rahmi Seren;Hakan Urey;Peter Enoksson

  • Author_Institution
    Ko? University, Electrical Engineering and Optical Microsystems Laboratory, Istanbul, TURKEY
  • fYear
    2008
  • Firstpage
    140
  • Lastpage
    141
  • Abstract
    An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
  • Keywords
    "Resonant frequency","Couplings","Lenses","Microoptics","Arrays","Damping","Beam steering"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607868
  • Filename
    4607868
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3628682