• DocumentCode
    3628683
  • Title

    Towards integration of glass microlens with silicon comb-drive X-Y microstage

  • Author

    Karolina Laszczyk;Sylwester Bargiel;Christophe Gorecki;Jerzy Krezel

  • Author_Institution
    University of Franche-Comt?, FEMTO-ST/CNRS, Besan?on, France
  • fYear
    2008
  • Firstpage
    168
  • Lastpage
    169
  • Abstract
    We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
  • Keywords
    "Lenses","Microoptics","Silicon","Glass","Fabrication","Bonding","Optical device fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607882
  • Filename
    4607882
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3628683