Performance improvement of a resonant pressure sensor by means of model based design optimisation

This paper deals with the performance improvement of a resonant pressure sensor designed for MHz range and realised in the LTCC (Low Temperature Co-fired Ceramics) technology. A new upgraded and modified sensor model residing on an analytical concept is demonstrated. Based on this model, sensitivity of the sensor could be drastically increased only by a change of the cylindrical cavity radius which is part of the pressure sensitive capacitor radius, but without any modification in the sensor set-up arrangement. Results derived by numerical simulation using the modified sensor model are compared with those attained by the practical measurement.