Title :
Experimental study of Ti/Pt thin film heater and temperature sensors on Si platform
Author :
D. Resnik;D. Vrtačnik;U. Aljančič;M. Možek;S. Amon
Author_Institution :
Laboratory of Microsensor Structures and Electronics, Faculty of Electrical Engineering, University of Ljubljana, Trzaska 25, 1000, SLOVENIA
Abstract :
Thin film Ti/Pt heaters and temperature sensors were designed and fabricated to provide controlled heating of meandered microchannels realized on the opposite side of the Si platform. Ti/Pt heaters and temperature sensors were fabricated simultaneously by DC sputtering on SiO2/Si substrate. Annealing temperature in the range 400-700?C was found to influence significantly the sheet resistance and consequently the final resistance of deposited Ti/Pt layers. Measured temperature coefficient of resistance for temperature sensors and heaters was between 1440 and 1700 ppm. Improved temperature response and heating up to 250?C with 27% decrease of power consumption was obtained by Pyrex cavity insulation.
Keywords :
"Semiconductor thin films","Thin film sensors","Temperature sensors","Sputtering","Heating","Temperature measurement","Temperature control","Microchannel","Substrates","Annealing"
Conference_Titel :
Sensors, 2009 IEEE
Print_ISBN :
978-1-4244-4548-6
DOI :
10.1109/ICSENS.2009.5398328
