Title :
Design of a Capacitive LTCC-based Pressure Sensor
Author :
Darko Belavič;Marina Santo Zarnik;Cristina Marghescu;Ciprian Ionescu;Paul Svasta;Marko Hrovat;Srečko Maček;Igor Lipušček;Sandi Kocjan
Author_Institution :
HIPOT-RR, Trubarjeva 7, 8310 Sentjernej, Slovenia
Abstract :
A capacitive pressure sensor was realized by using low-temperature co-fired ceramic (LTCC) materials and technology. The paper will present the design considerations of a sensing element, and compares the experimental data to the theoretical design, with the aim to improve the sensor´s characteristics. Special points of attention are the linearity, the temperature behaviour, the pressure media and the behaviour of the reference pressure medium.
Keywords :
"Capacitive sensors","Ceramics","Sensor phenomena and characterization","Dielectric materials","Laminates","Crystalline materials","Sheet materials","Glass","Thermal conductivity","Electronics packaging"
Conference_Titel :
Design and Technology of Electronics Packages, (SIITME) 2009 15th International Symposium for
Print_ISBN :
978-1-4244-5132-6
DOI :
10.1109/SIITME.2009.5407406
