A knowledge based approach for MEMS fabrication process design automation

In this paper an approach for fabrication process design automation is presented that is backed up by a comprehensive process data management system. The synthesis procedure is roughly based on an approach originally developed at the University of Michigan. It starts with a two-dimensional cross-section representation of the intended MEMS structure that is analysed to identify typical process features. This leads to an abstract process flow frame to be filled with concrete process steps and process sequences from the process data management system.