• DocumentCode
    3648679
  • Title

    Submicrometer-width TiO2 waveguides

  • Author

    C. C. Evans;J. D. B. Bradley;J. T. Choy;O. Reshef;P. B. Deotare;M. Lončar;E. Mazur

  • Author_Institution
    School of Engineering and Applied Sciences, Harvard University, 9 Oxford Street, Cambridge, Massachusetts 02138, USA
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We fabricate submicrometer-width TiO2 strip waveguides and measure optical losses at 633, 780, and 1550 nm. Losses of 30, 13, and 4 dB/cm (respectively) demonstrate that TiO2 is suitable for visible-to-infrared on-chip microphotonic devices.
  • Keywords
    "Optical waveguides","Optical losses","Loss measurement","Optical device fabrication","Strips","Optical films"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • ISSN
    2160-8989
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325757