Title :
A thin film pressure sensor with double sensitive units
Author :
Hongqing Pan;Guangyu Hu;Pingguo Cao;Yubing Wang;Yunjian Ge;Feng Shuang
Author_Institution :
Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, 230031, China
Abstract :
The paper expresses two strategies for improving the sensitivity of capacitive pressure sensor. Microstructuring of dielectric elastomer surface can significantly increase capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For the thin sensor, multi sensor units using stacked structure have multiplied effect in signal output.
Keywords :
"Films","Pressure sensors","Capacitors","Capacitance","Indium tin oxide","Sensitivity"
Conference_Titel :
Information and Automation, 2015 IEEE International Conference on
DOI :
10.1109/ICInfA.2015.7279792
