Title :
CMOS-MEMS novel resonator for filter tuning
Author :
H. Goktas;M.E. Zaghloul
Author_Institution :
Department of Electrical and Computer Engineering, The George Washington University, DC 20052, USA
Abstract :
Novel MEMS resonators are presented in this work, and were designed in CMOS process. The devices were fabricated and tested. The work shows the combined CMOS and MEMS process. The resonators are designed in Fixed -Fixed beam structure. Applications are low power temperature tuning filters, and temperature sensors.
Keywords :
"Laser beams","Resonant frequency","Tuning","Micromechanical devices","Heating","Frequency measurement","Measurement by laser beam"
Conference_Titel :
Circuits and Systems (MWSCAS), 2015 IEEE 58th International Midwest Symposium on
DOI :
10.1109/MWSCAS.2015.7282017
