Title :
Photo-induced trimming of chalcogenide-on-silicon photonic integrated circuits
Author :
R. Califa;D. Munk;I. Bakish;A. Zadok;H. Genish;Yu. Kaganovskii;M. Rosenbluh
Author_Institution :
Faculty of Engineering, Bar-Ilan University, Ramat-Gan 5290002, Israel
Abstract :
Silicon-photonic devices are tuned by selective photo removal of chalcogenide glass upper claddings. Phase delays in Mach-Zehnder interferometers and coupling ratios of ring resonators are adjusted. The transfer functions of devices remain stable following trimming.
Keywords :
"Optical waveguides","Optical device fabrication","Transfer functions","Optical ring resonators","Optical coupling","Optical filters"
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
Print_ISBN :
978-1-4673-6834-6
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMN.2015.7288827
