DocumentCode
3667347
Title
Liquid mass sensing of glucose in solution with resonating microplates
Author
Yoav Linzon;Erez David Chubara;Slava Krylov;Rob B. Ilic;Alexander Golberg
Author_Institution
Faculty of Engineering, Tel Aviv University, Israel
fYear
2015
Firstpage
1
Lastpage
2
Abstract
We sense in aqueous environment water solution deposits on thin Silicon-on-Insulator micro-resonator membranes, where distinct discern to different glucose solution components is attained in terms of the flexural vibration mode´s resonant frequency and quality factor.
Keywords
"Liquids","Micromechanical devices","Optical resonators","Sugar","Optical sensors","Nanoelectromechanical systems"
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
ISSN
2160-5033
Print_ISBN
978-1-4673-6834-6
Electronic_ISBN
2160-5041
Type
conf
DOI
10.1109/OMN.2015.7288851
Filename
7288851
Link To Document