• DocumentCode
    3667347
  • Title

    Liquid mass sensing of glucose in solution with resonating microplates

  • Author

    Yoav Linzon;Erez David Chubara;Slava Krylov;Rob B. Ilic;Alexander Golberg

  • Author_Institution
    Faculty of Engineering, Tel Aviv University, Israel
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We sense in aqueous environment water solution deposits on thin Silicon-on-Insulator micro-resonator membranes, where distinct discern to different glucose solution components is attained in terms of the flexural vibration mode´s resonant frequency and quality factor.
  • Keywords
    "Liquids","Micromechanical devices","Optical resonators","Sugar","Optical sensors","Nanoelectromechanical systems"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288851
  • Filename
    7288851