• DocumentCode
    3667386
  • Title

    Row/column addressing of scalable silicon photonic MEMS switches

  • Author

    Niels Quack;Tae Joon Seok;Sangyoon Han;Wencong Zhang;Richard S. Muller;Ming C. Wu

  • Author_Institution
    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, 94720, USA
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present a scalable silicon photonic MEMS switch with an actuation scheme requiring only 2N electrical contacts for an N×N switch matrix. Unit cell size is 145μm × 145μm and switching loss 1.5dB at 1550nm.
  • Keywords
    "Optical switches","Optical waveguides","Silicon photonics","Optical device fabrication","Optical imaging"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288891
  • Filename
    7288891
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667386