• DocumentCode
    3667390
  • Title

    Piezoresistive displacement sensor integrated in resonant varifocal mirror

  • Author

    K. Nakazawa;T. Sasaki;H. Furuta;J. Kamiya;T. Kamiya;K. Hane

  • Author_Institution
    Dept. of Nanomechanics, Tohoku University, Sendai, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    An electrostatically actuated resonant varifocal mirror with a piezoresistive displacement sensor is reported. The focal length of the varifocal mirror is monitored by the sensor. The device is fabricated from a silicon-on-insulator wafer and a glass wafer. The p-type silicon region which is formed in n-type top silicon layer by boron ion implantation is used as the piezoresistive displacement sensor. The mirror surface profile and sensor signal are measured.
  • Keywords
    "Mirrors","Piezoresistance","Silicon","Glass","Fabrication","Micromechanical devices","Aluminum"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288895
  • Filename
    7288895
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667390