• DocumentCode
    3672737
  • Title

    Analytical modeling of membrane bending in range of large deflections

  • Author

    Cezary Maj;Piotr Zaj?c;Micha? Szermer;Wojciech Zabierowski;Mykhaylo Melnyk;Andrzej Napieralski;Mykhaylo Lobur

  • Author_Institution
    Dept. of Microelectronics and Computer Science, Lodz University of Technology, Wolczanska street 221/223, 90-924 Lodz, POLAND
  • fYear
    2015
  • Firstpage
    4
  • Lastpage
    6
  • Abstract
    In early stage of the design process, modeling is a crucial phase as it allows the designer estimating the device performance. Very often, this phase is time-consuming, especially when FEM simulator is used. Hence, a fast and reliable method is desirable. Moreover, in case of simple structures which behavior is described with quite simple equations, the use of analytical model is obvious. In this paper we present a complete model of a membrane bending in range of large deflections that has been developed using FEM simulations.
  • Keywords
    "Mathematical model","Solid modeling","Finite element analysis","Analytical models","Silicon","Approximation methods","Performance evaluation"
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2015 XI International Conference on
  • Type

    conf

  • Filename
    7299439