DocumentCode :
3672737
Title :
Analytical modeling of membrane bending in range of large deflections
Author :
Cezary Maj;Piotr Zaj?c;Micha? Szermer;Wojciech Zabierowski;Mykhaylo Melnyk;Andrzej Napieralski;Mykhaylo Lobur
Author_Institution :
Dept. of Microelectronics and Computer Science, Lodz University of Technology, Wolczanska street 221/223, 90-924 Lodz, POLAND
fYear :
2015
Firstpage :
4
Lastpage :
6
Abstract :
In early stage of the design process, modeling is a crucial phase as it allows the designer estimating the device performance. Very often, this phase is time-consuming, especially when FEM simulator is used. Hence, a fast and reliable method is desirable. Moreover, in case of simple structures which behavior is described with quite simple equations, the use of analytical model is obvious. In this paper we present a complete model of a membrane bending in range of large deflections that has been developed using FEM simulations.
Keywords :
"Mathematical model","Solid modeling","Finite element analysis","Analytical models","Silicon","Approximation methods","Performance evaluation"
Publisher :
ieee
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2015 XI International Conference on
Type :
conf
Filename :
7299439
Link To Document :
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