Numerical study of resolution in near field microscopy for dielectric samples

We present a detailed numerical study of effects that the height of probe and probe ground distance have on the resolution of near field microscopy for dielectric samples. We show the results of contrast capacitance when we change these parameters using a cone sphere tip model in numerical simulation, and discuss how these factors can influence the resolution in microscopy. We propose possible effective approaches to improve the resolution in experiment according to the obtained conclusions in this paper.