• DocumentCode
    36765
  • Title

    Special Section on the 2011 Advanced Semiconductor Manufacturing Conference

  • Author

    Patterson, Oliver D. ; Werbaneth, Paul ; Eisenbraun, Eric

  • Author_Institution
    IBM, Hopewell Junction, NY, USA
  • Volume
    26
  • Issue
    1
  • fYear
    2013
  • fDate
    Feb. 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The six papers in this special section are enhanced versions of papers presented at the 22nd annual Advanced Semiconductor Manufacturing Conference (ASMC), held in Sarasota Springs, NY, in 2011.
  • Keywords
    Meetings; Semiconductor device manufacture; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2237951
  • Filename
    6423986
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=36765