Title :
Probabilistic analytical benchmarking for ESDS manufacturing process
Author :
L. H. Koh;C. B. Goh;Y. H. Goh
Author_Institution :
Everfeed Technology Pte Ltd, 2 Tuas Link 1, Jurong Industrial Estate, 638590 Singapore
Abstract :
A chronological ESD process analysis is proposed to identify the root cause of ESD sensitive devices´ premature failure due to several field returns which exceeded customers´ factory targeted ESD failure control threshold. Two novel quantitative ESD risk indices are proposed to benchmark the process ESD capability using probabilistic statistical technique.
Keywords :
"Electrostatic discharges","Production facilities","Benchmark testing","Probabilistic logic","Reliability","Ionization"
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2015 37th
DOI :
10.1109/EOSESD.2015.7314736