DocumentCode :
3688240
Title :
Monolithic integration of the self-rolled-up vertical SiNx ring resonator and the ridge waveguide
Author :
Xin Yu;Ehsan Arbabi;Lynford L. Goddard;Xiuling Li;Xiaogang Chen
Author_Institution :
Department of Electrical and Computer Engineering, University of Illinois, Urbana, 61801, USA
fYear :
2015
Firstpage :
486
Lastpage :
487
Abstract :
We incorporated axial confinement to the self-rolled-up SiNx tube to form a vertical ring resonator and monolithically integrate it with a ridge waveguide to suppress higher order mode and achieve 3x wider free spectral range.
Keywords :
"Electron tubes","Couplers","System-on-chip","Photonics","Electric potential","Fabrication","Silicon"
Publisher :
ieee
Conference_Titel :
Photonics Conference (IPC), 2015
ISSN :
1092-8081
Type :
conf
DOI :
10.1109/IPCon.2015.7323688
Filename :
7323688
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3688240
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