Title :
Impacts of tapered sidewall profiles with high aspect ratio on subwavelength grating structure
Author :
W. X. Yu;D. C. Wu;Y. Yi
Author_Institution :
Integrated nano optoelectronics laboratory, University of Michigan, United States of America
Abstract :
We have numerically demonstrated the significant impacts on the resonance mode characteristics of subwavelength grating structures due to tapered sidewall profile and high aspect ratio, which is normally obtained from CMOS-compatible nanoelectronic fabrication processes.
Keywords :
"Gratings","Photonics"
Conference_Titel :
Photonics Conference (IPC), 2015
DOI :
10.1109/IPCon.2015.7323730
