Efficient nanoscale photonic devices and monolithic electronic-photonic subsystems in sub-100 nm SOI CMOS

We demonstrate efficient photonic devices that rely on sub-100nm features in unmodified 45nm SOI CMOS, including photonic crystals, array-antenna grating couplers, and modulators. We then show monolithically integrated electronic-photonic systems comprising millions of transistors and thousands of photonic devices, including a complete chip-to-chip photonic link.