• DocumentCode
    3691322
  • Title

    High-resolution interdigitated back contact solar cell inspection using Terahertz microprobes

  • Author

    S. Sawallich;C. Matheisen;M. Nagel;I. Cesar

  • Author_Institution
    Protemics GmbH, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Terahertz (THz) near-field microscopy is presented as a new characterization tool for photovoltaic applications: High-resolution sheet resistance measurements at interdigitated back-contact (IBC) solar cell samples are conducted, revealing previously undetectable features with lateral dimensions as small as a few tens of μm. Despite the very high maximum resolution the method is reasonably fast and suited for full wafer-scale inspection tasks.
  • Keywords
    "Electrical resistance measurement","Inspection","Doping","Surface resistance","Surface morphology","Photovoltaic cells"
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
  • ISSN
    2162-2027
  • Electronic_ISBN
    2162-2035
  • Type

    conf

  • DOI
    10.1109/IRMMW-THz.2015.7327475
  • Filename
    7327475
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3691322