Coplanar stripline (CPS) emitter and transceiver microprobes for ultra-high bandwidth on-chip Terahertz measurements

A novel THz emitter and transceiver for on-chip failure location and waveguide inspection is introduced. Based on a flexible PET cantilever it features a CPS waveguide for wear-free capacitive coupling to devices under test (DUTs). Embedded LT-GaAs photoconductive switches allow for ultra-high bandwidth THz pulse generation and detection which is demonstrated in exemplary measurements on CPS structures featuring different types of discontinuities. After coupling to the DUT pulse rise-times as short as 0.6 ps are achieved.