DocumentCode
3691671
Title
Multi-photon response of photon-number-resolving superconducting single photon detector
Author
P. Gu;L. M. Zhao;C. Wan;L. B. Zhang;L. Kang;P. H. Wu
Author_Institution
RISE, Nanjing Univ., Nanjing, 210093, China
fYear
2015
Firstpage
1
Lastpage
2
Abstract
A new photon-number-resolving superconducting single photon detector is fabricated and tested. To integrate the resistors connected to the nanowire, we used one step of electron-beam lithography and four subsequent photolithography steps. A micro cavity was introduced to the structure in order to gain relatively high quantum efficiency. The device fabricated could resolve 6 photons.
Keywords
"Photonics","Detectors","Lithography","Resistors","Arrays","Niobium compounds","Films"
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
ISSN
2162-2027
Electronic_ISBN
2162-2035
Type
conf
DOI
10.1109/IRMMW-THz.2015.7327929
Filename
7327929
Link To Document