DocumentCode :
3691932
Title :
Data analytics in semiconductor industry
Author :
David Wang
Author_Institution :
MKS Umetrics, Asia, Blk 4012 Ang Mo Kio Ave 10, Unit #07-07 Techplace 1, Singapore 569628
fYear :
2015
Firstpage :
1
Lastpage :
4
Abstract :
Batch-wise manufacturing processes are found in many industries like chemical, pharmaceutical, bio-technical and semi-conductor. Typical examples include PVC polymerization, fermentations, beer brewing, and wafer etching. Batch process usually has a finite duration, from initialization to completion, and the trajectories of batch process variables describe dynamic time dependency. Batch processes give rise to data tables that are different from the two-way data structures. Measured data from batches are handled in three-way matrices (Figure 1). There might be more than one block of batch process data. Initial conditions data are given by one data table (often called the Z-matrix), information of relevance here would be characteristics of raw material or environment. In the second data matrix, batch evolution data are gathered. This matrix is often called the X-matrix. Naturally, the last block of data, often called the Y-matrix, is composed of results and product quality data for each batch.
Keywords :
"Semiconductor device modeling","Data models","Batch production systems","Principal component analysis","Analytical models","Training","Data analysis"
Publisher :
ieee
Conference_Titel :
Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM), 2015
Type :
conf
Filename :
7328871
Link To Document :
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