DocumentCode
3691935
Title
A review of variance amplifications by advanced process control
Author
Keung Hui;Jason Mou
Author_Institution
Taiwan Semiconductor Manufacturing Company, Limited 8, Li-Hsin Road VI, HsinChu Science Park, HsinChu, Taiwan, R.O.C.
fYear
2015
Firstpage
1
Lastpage
5
Abstract
As critical dimensions of semiconductor devices shrink towards 10n and smaller, applications of advanced process control (APC) solutions no longer reap large reductions of observed variances as it used to behave, sometimes with bare improvements or even deteriorations, consequently raising disgruntlement of the management.
Keywords
"Metrology","Process control","Delays","Semiconductor device measurement","Transfer functions","Manufacturing","Production"
Publisher
ieee
Conference_Titel
Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM), 2015
Type
conf
Filename
7328895
Link To Document