• DocumentCode
    3692048
  • Title

    Single-step dry-etched lateral PIN by using trench structure for optical mode switch

  • Author

    Ryan Imansyah;Luke Himbele;Haisong Jiang;Kiichi Hamamoto

  • Author_Institution
    Interdisciplinary Graduate School of Engineering Science, Kyushu University, 6-1, Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
  • fYear
    2015
  • Firstpage
    232
  • Lastpage
    234
  • Abstract
    Trench structure that enables lateral PIN with single-step dry-etching was exploited to optical mode switch for the first time. Successful current-injected (60mA) optical mode switching was confirmed with polarization independent characteristics.
  • Keywords
    "Optical switches","Optical device fabrication","Silicon","Optical waveguides","Etching","Optical filters","Optical refraction"
  • Publisher
    ieee
  • Conference_Titel
    Photonics in Switching (PS), 2015 International Conference on
  • Type

    conf

  • DOI
    10.1109/PS.2015.7329010
  • Filename
    7329010
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3692048