6 GHz range SAW tags and sensors

The feasibility of using 6 GHz frequencies for passive SAW-tags and sensors type devices is demonstrated. An example of the in-line 6 GHz SAW tag design is presented. Supposing that Ultra-Wide-frequency Band (UWB, B=775MHz) can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of approximately 50dB. The SAW-tags and sensor test device has been manufactured using E-beam lithography and Nano-Imprint technology and demonstrate performance close to predicted, including the loss level of approximately 55dB. The possibility of high throughput manufacturing by combining Nano-Imprint and E-beam Lithography (NIL) is discussed. SAW sensor test devices produced using NIL are demonstrated.