DocumentCode
3694888
Title
Experimental study on quantum mechanical effect for insensitivity of threshold voltage against temperature variation in strained SOI MOSFETs
Author
Chang-Hoon Jeon;Byung-Hyun Lee;Byung Chul Jang;Sung-Yool Choi;Yang-Kyu Choi
Author_Institution
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
fYear
2015
Firstpage
1
Lastpage
3
Abstract
The temperature dependence of threshold voltage (VT) in a thin-body MOSFET, which was built on a strained silicon-on-insulator (sSOI) wafer, is examined in a temperature range of 173 K to 373 K. The insensitive temperature dependency of threshold voltage (VT ) is attributed to the strain effect arisen from the sSOI, which makes the energy quantization stronger due to the lowered conductivity mass. Additionally, enhanced mobility of 770 cm2/V•sec at room temperature is achieved due to the strain effect.
Keywords
"Threshold voltage","Temperature dependence","MOSFET","Temperature distribution","Strain","Logic gates","Silicon-on-insulator"
Publisher
ieee
Conference_Titel
SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2015 IEEE
Type
conf
DOI
10.1109/S3S.2015.7333545
Filename
7333545
Link To Document