From microelectromechanical switches to nanoelectromechanical switches: Lessons and differences

Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches and nanoelectromechanical (NEM) switches have actively been researched so far by many research groups. This is because they are considered as one of the ideal switching devices, thanks to their ideal zero leakage characteristic, nearly infinite sub-threshold slope, large On/Off current ratio, low power consumption, and immunity to harsh environments. Now, we are dreaming of a NEM IC in the future (Fig. 1).