A review of HPR and its applications: Control of air turbine spindle and hybrid electro-pneumatic ultra-precision vertical positioning stage

The author has been researching on the development of a new type of pneumatic pressure regulator, called HPR (High precision quick response pressure regulator) and its applications. In this paper, 2 of those applications of HPR to ultra-precision machinery elements are introduced. One application is to the rotation feedback control of an air turbine spindle. The superiority of the proposed method was clearly shown in terms of quicker control and lower energy consumption. In addition, the performance of the disturbance force observer was discussed and improvement of the robustness was validated experimentally. The other application is to hybrid electro-pneumatic vertical positioning device. By the experimental results, the superiority of the proposed control method is indicated.