DocumentCode :
3701590
Title :
Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM
Author :
Judit K?m?n;Attila Bony?r;Istv?n Csarnovics;Csaba Cserh?ti
Author_Institution :
Department of Electronics Technology, Budapest University of Technology and Economics, Hungary
fYear :
2015
Firstpage :
51
Lastpage :
55
Abstract :
Light induced holographic grating and electron beam induced stripes were created on Ge28Se72 chalcogenide thin film and its local surface mechanical properties were studied by AFM. The Young´s moduli of the grating, the stripes and the reference area were determined through force curves and the tip-sample energy dissipation was calculated from the tapping mode point spectroscopy curves. Significant difference was obtained between the created structures and the reference area regarding the Young´s modulus and the tip-sample energy dissipation.
Keywords :
"Films","Photonics"
Publisher :
ieee
Conference_Titel :
Design and Technology in Electronic Packaging (SIITME), 2015 IEEE 21st International Symposium for
Type :
conf
DOI :
10.1109/SIITME.2015.7342294
Filename :
7342294
Link To Document :
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