Title :
Static elimination in Vacuum
Author :
Takashi Ikehata;Daisuke Nemoto;Wanting He;Takeshi Matsuo;Naoyuki Sato;Kazuo Okano
Author_Institution :
Ibaraki University, 4-12-1 Nakanarusawa, Hitachi, Ibaraki, 316-8511, Japan
Abstract :
Static elimination characteristics of an AC corona ionizer in N2-CF3I and N2-O2 gases at reduced pressure have been explored. The amplitude of neutralizing current and voltage ripple of the object during static elimination rapidly increase with decreasing the gas pressure. It is found that the best static elimination performance can be attained if we choose the gas pressure and the ionizer frequency adequately.
Keywords :
"Corona discharge","Static power converters","Discharges (electric)","Ions","Electric potential","Nitrogen","Voltage measurement","Pressure measurement"
Conference_Titel :
Industry Applications Society Annual Meeting, 2015 IEEE
DOI :
10.1109/IAS.2015.7356748
