Title :
A thermal network model for piezoresistive pressure sensors
Author :
J. Lotichius;T. Singer;G. Brokmann;H. Übensee;T. Ortlepp;M. Kupnik;R. Werthschützky
Author_Institution :
Technische Universitä
Abstract :
Excitation of resistive sensors with dynamic signals for low power consumption requires focusing on thermal and electrical behavior. Knowledge of both settling times is beneficial for sensor error correction. Therefore, a thermal model for piezoresistive pressure sensors is presented in this paper. It yields analytical equations for temperature distribution from basic physics laws. This lumped element equivalent circuit model (EQC) offers a quick way to simulate vast parameter numbers. It incorporates self-heating as well as ambient temperature influence. Our model uses 13 thermal resistors and seven thermal capacitances. Comparing the resistance change due to thermal behavior of a sample sensor with the model shows deviations smaller than the measurement uncertainty of 42 ppm.
Keywords :
"Heating","Electrical resistance measurement","Temperature measurement","Measurement uncertainty","Temperature sensors"
Conference_Titel :
SENSORS, 2015 IEEE
DOI :
10.1109/ICSENS.2015.7370569