• DocumentCode
    3726164
  • Title

    Analysis of laser induced oxidation processes with different laser powers

  • Author

    Feng Xia;Xinzheng Zhang;Meng Wang;Sanming Yi;Qian Liu;Jingjun Xu

  • Author_Institution
    The MOE Key Laboratory of Weak-Light Nonlinear Photonics, and TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China
  • Volume
    2
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Metal-transparent-metallic-oxide (MTMO) grayscale photomasks fabricated by laser-induced oxidization are studied based on three stages oxidation theories and absorbed laser power density distribution. The calculated fabrication diameter is consistent with the experimental fabrication size.
  • Keywords
    "Oxidation","Fabrication","Films","Gray-scale","Density measurement","Power system measurements","Indium"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015 11th Conference on
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2015.7376157
  • Filename
    7376157
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3726164