Current state and prospects of microtransducers for position and motion characteristics of the object consideration

The paper deals with the state and prospects of development of microtransducers for positioning and motion parameters for object estimation, and analysis of the problems of creating monolithic microtransducers. Generalized mathematical models as well as mathematical models for converters of direct and compensatory types are discussed. It is shown that the construction of such converters must use a compensation transformation scheme.