A high-speed electromagnetic oscillatory actuator with multiple movers and multiple resonant frequencies

In this paper, we propose a high-speed moving magnet-type electromagnetic oscillatory actuator in which a multiple-mover structure with multiple resonant frequencies for drive the optical scanning mirror. In the experiment, a prototype actuator structure with three movers generated three resonant frequencies and two angular amplitudes of more than 15° at frequencies of 718 and 1217 Hz, respectively.