Adaptive backstepping nonsingular terminal sliding control of MEMS gyroscope

An adaptive nonsingular terminal sliding mode (NTSM) tracking control scheme based on backstepping design is presented for Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes in this paper. The nonsingular terminal sliding mode controller is designed based on backstepping strategy to eliminate the singularity, while ensuring the control system to reach the sliding surface and converge to equilibrium point in a finite period of time from any initial state. In addition, the proposed approach develops an online identifier scheme, which can real-time estimate the angular velocity and the damping and stiffness coefficients. All adaptive laws in the control system are derived in the same Lyapunov framework, which can guarantee the globally asymptotical stability of the closed loop system. Numerical simulations for a MEMS gyroscope are investigated to demonstrate the validity of the proposed control approaches.