Title :
A reliable CMOS-MEMS platform for titanium nitride composite (TiN-C) resonant transducers with enhanced electrostatic transduction and frequency stability
Author :
Ming-Huang Li;Chao-Yu Chen;Sheng-Shian Li
Author_Institution :
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan
Abstract :
A reliable CMOS-MEMS platform for on-chip resonant transducer and readout circuit integration is presented in this paper with (i) well-defined etch stops and relaxed release windows for high fabrication yield, (ii) narrow transducer gaps (<; 400nm) for efficient electrostatic transduction, and (iii) novel titanium nitride composite (TiN-C) structure for dielectric charge elimination and temperature compensation. With the proposed platform, MEMS resonant transducers which exhibit low frequency drift over temperature and time, excellent electrostatic coupling, and inherent CMOS circuit integration are successfully demonstrated.
Keywords :
"Resonant frequency","Optical resonators","Frequency measurement","Dielectrics","Micromechanical devices","Metals","Transducers"
Conference_Titel :
Electron Devices Meeting (IEDM), 2015 IEEE International
Electronic_ISBN :
2156-017X
DOI :
10.1109/IEDM.2015.7409727