• DocumentCode
    3748232
  • Title

    Epitaxial CVD growth of high-quality graphene and recent development of 2D heterostructures

  • Author

    Hiroki Ago;Yui Ogawa;Kenji Kawahara;Yoshito Ito;Baoshan Hu;Carlo M. Orofeo;Pablo Soils Fernandez;Hiroko Endo;Hiroki Hibino;Seigi Mizuno;Kazuhito Tsukagoshi;Masaharu Tsuji

  • Author_Institution
    Institute for Materials Chemistry and Engineering (IMCE), Kyushu University, Japan
  • fYear
    2015
  • Abstract
    We demonstrate a novel epitaxial CVD method to grow high quality single-layer graphene using a thin Cu(111) film instead of conventional Cu foil. The atomically smooth Cu(111) catalyst produced the graphene with less defects and controlled orientation of the hexagonal lattice. The CVD graphene showed the carrier mobility as high as 20,000 cm2/Vs at room temperature. Using the uniform graphene sheet, densely aligned graphene nanoribbons were produced by a metal-assisted etching technique, resulting a high on/off ratio of 5,000. In addition, the epitaxial CVD method was applied to grow uniform double-layer graphene with more than 90% coverage. These GNRs and double-layer graphene are expected as promising candidates for semiconductor devices. Furthermore, heterostructures of MoS2 and graphene were developed, and unique photo-responsive devices were observed.
  • Keywords
    "Graphene","Epitaxial growth","Etching","Substrates","Logic gates","Optical films"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2015 IEEE International
  • Electronic_ISBN
    2156-017X
  • Type

    conf

  • DOI
    10.1109/IEDM.2015.7409779
  • Filename
    7409779