DocumentCode
375044
Title
MODOS - model based design optimization system
Author
Peters, D. ; Bolte, H. ; Böhnke, R. ; Bischoff, L. ; Laur, R.
Author_Institution
Inst. for Electromagn. Theory & Microelectron., Bremen Univ., Germany
Volume
1
fYear
2000
fDate
2000
Firstpage
132
Abstract
Model based design optimization is becoming a very important task. The continuous reduction of technologically realizable dimensions leads to growing coupling and interaction between system parameters. The complexity of microand future nanosystems is growing permanently while production parameters are subject to fluctuations. In order to take. advantage of the new technologies strengths the development process needs to be supported by sophisticated optimization tools like the one presented in this work
Keywords
design engineering; micromechanical devices; optimisation; MODOS; development process; microsystem; model based design optimization system; nanosystem; production parameter fluctuations; Algorithm design and analysis; Design optimization; Fluctuations; Joining processes; Mathematical model; Microelectronics; Optimized production technology; Process design; Robustness; Tiles;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2000. Proceedings of the 43rd IEEE Midwest Symposium on
Conference_Location
Lansing, MI
Print_ISBN
0-7803-6475-9
Type
conf
DOI
10.1109/MWSCAS.2000.951603
Filename
951603
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