A programmable MEMS bandpass filter

Author

Diamantis, S. ; Ahmadi, M. ; Jullien, G.A. ; Miller, W.C.

Author_Institution

Windsor Univ., Ont., Canada

Volume

1

fYear

2000

fDate

2000

Firstpage

522

Abstract

A programmable microelectromechanical (MEMS) filter based on using coupled microresonators is developed. The resonators are interconnected by a square-truss coupling spring. An external control voltage is used to create electrostatic forces that effectively can vary spring constants so as to obtain a bandpass filter whose center frequency and bandwidth are programmable. The basic operation, theoretical modeling and design methodology are developed for a two-resonator programmable MEMS filter. The programmable frequency ranges of both the individual resonators and the two-resonator filter are demonstrated by a 3-D FEA simulation with IntelliSuite software

Keywords

band-pass filters; circuit tuning; electrostatic devices; equivalent circuits; finite element analysis; micromechanical resonators; modelling; passive filters; programmable filters; resonator filters; 3D FEA simulation; IntelliSuite software; MEMS bandpass filters; coupled microresonators; design methodology; electrostatic forces; external control voltage; interconnected resonator; microelectromechanical filter; modeling; programmable MEMS filter; programmable bandwidth; programmable center frequency; square truss coupling spring; two-resonator MEMS filter; Band pass filters; Bandwidth; Electrostatics; Force control; Frequency; Microcavities; Micromechanical devices; Resonator filters; Springs; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2000. Proceedings of the 43rd IEEE Midwest Symposium on

Conference_Location

Lansing, MI

Print_ISBN

0-7803-6475-9

Type

conf

DOI

10.1109/MWSCAS.2000.951698

Filename

951698