Extraction of TL-lumped RF macromodels for MEMS switches

This contribution refers to a methodology for the extraction of RF macromodels for electrostatically actuated switches. The extraction is based on the results obtained from three RF simulations carried out at the device-level model, with the finite integration technique, and use of a fitting procedure based on closed form relationships for the TL-lumped macromodel. Two test configurations were studied and acceptable relative errors in the S-parameters are obtained. Improvements are sometimes possible if a frequency dependent model is adopted for the switch inductivity.