Title :
Bonding of LINBO3 thin film on Si substrate using laser irradiation
Author :
Hiroki Kawano;Ryo Takigawa;Hiroshi Ikenoue;Tanemasa Asano
Author_Institution :
Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Fukuoka, Japan
Abstract :
Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.
Keywords :
"Lithium niobate","Silicon","Bonding","Radiation effects","Substrates","Plasma temperature","Crystals"
Conference_Titel :
Microoptics Conference (MOC), 2015 20th
Print_ISBN :
978-4-8634-8487-0
DOI :
10.1109/MOC.2015.7416527
