Design, development and analysis of a haptic-enabled modular flexure-based manipulator

The design, computational analysis, and experimental study of a modular flexure-based micro/nano manipulator is presented. The system combines a novel, compact, modular flexure-based mechanism with a haptic device, and a bilateral control architecture to enable rapid haptically-guided micromanipulation tasks. In principle the modular design allows manipulators to be constructed according to task-specific requirements. These mechanisms are designed for minimal mass, to maximize the transient response time of the system. Theoretical modelling and computational analysis of the one degree of freedom (DOF) flexure-based mechanism is performed. Modal analysis, mode shapes, maximum stresses generated within the mechanism and the maximum workspace of the mechanism are investigated. The modular mechanism has a measured range of translational motion of approximately 38.9μm in one DOF, with the capability to be grouped together to create two or three DOF of motion. The first natural frequency of the prototype mechanism is measured at 417Hz, indicating a response time rapid enough to be undetectable to a human user. An experimental research facility is established as a proof of concept. The teleoperated control scheme is shown to track motions with accuracy of approximately 104nm, in a stable and transparent manner.