Silicon Micromachined Lens Antenna for THz Integrated Heterodyne Arrays

Author

Llombart, Nuria ; Lee, Chi-Kwan ; Alonso-delPino, M. ; Chattopadhyay, Goutam ; Jung-Kubiak, Cecile ; Jofre, Lluis ; Mehdi, Imran

Author_Institution

Opt. Dept., Univ. Complutense de Madrid, Madrid, Spain

Volume

3

Issue

5

fYear

2013

fDate

Sept. 2013

Firstpage

515

Lastpage

523

Abstract

In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.

Keywords

antenna arrays; elemental semiconductors; microlenses; micromachining; photolithography; silicon; sputter etching; waveguides; Si; THz integrated heterodyne arrays; antenna prototype; deep reactive etching; extended hemispherical silicon lens; frequency 550 GHz; large antenna arrays; leaky wave waveguide feed; parallel process; photolithography; silicon micromachined lens antenna; silicon micromachining techniques; Antenna arrays; Fabrication; Feeds; Lenses; Optical waveguides; Resists; Silicon; Lens; leaky wave antennas; silicon fabrication; terahertz (THz);

fLanguage

English

Journal_Title

Terahertz Science and Technology, IEEE Transactions on

Publisher

ieee

ISSN

2156-342X

Type

jour

DOI

10.1109/TTHZ.2013.2270300

Filename

6558872