MOEMS-based instruments for in-situ scanning confocal microscopy

Author

Dickensheets, David L.

Author_Institution

Opt. Technol. Center, Montana State Univ., USA

Volume

1

fYear

2001

fDate

2001

Firstpage

68

Abstract

A new microscope is under development that combines the MOEMS scanner and focus control elements to achieve full 3-D beam positioning. A novel co-axial architecture utilizing an annular scan mirror permits a packaged instrument measuring less than 2 mm in diameter. This microscope will be suitable for fluorescence imaging, with a 0.4 N.A.. water-immersion lens

Keywords

Raman spectroscopy; fluorescence; micro-optics; microlenses; micropositioning; mirrors; near-field scanning optical microscopy; optical focusing; 2 mm; MOEMS scanner; Martian surface; Raman spectroscopy; annular scan mirror; co-axial architecture; confocal laser scanning microscopy; extraterrestrial; fluorescence imaging; focus control elements; full 3D beam positioning; in vivo confocal microscopy; medical applications; microscope; packaged instrument; rocks; soils; water-immersion lens; Biomedical optical imaging; Biomembranes; Focusing; Instruments; Lenses; Mirrors; Optical microscopy; Packaging; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE

Conference_Location

San Diego, CA

ISSN

1092-8081

Print_ISBN

0-7803-7105-4

Type

conf

DOI

10.1109/LEOS.2001.969176

Filename

969176